September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description There is a new gate valve on the load lock. Please see Jon Hummel before operating. ,p> First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-LCO, 2-Cr, 3-Al Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.



Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
No Charge
$0/hr
Reservations
Date Start End User
09/29/2020 01:00 PM 07:00 AM Yaoyu Ren
10/01/2020 09:00 AM 01:00 PM Sarit Zhukovsky
Logs
Thu, Oct 01, 2020
9:00 am - 1:00 pm
Sarit Zhukovsky
View Reservation
Cr Ta
Tue, Sep 29, 2020
1:00 pm - 7:00 am
Yaoyu Ren
View Reservation
LCO Al
Mon, Sep 28, 2020
10:00 am - 11:30 am
H M Iftekhar Jaim
View Reservation
Al Fe
Fri, Sep 25, 2020
9:00 am - 2:45 pm
Sarit Zhukovsky
View Reservation
Cr Ta
Thu, Sep 24, 2020
10:00 am - 2:30 pm
Sarit Zhukovsky
View Reservation
Cr Ta
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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