DEP-01: AJA ATC 1800 Sputtering unit

July 1, 2026 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Au, 2 - Cu, 3 - Ti
Please email Dr. Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $300 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Daniel Lewis
dlewis17@umd.edu
301-405-5018

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
07/02/2026	10:30 AM	11:30 AM	Tathansh Joshi
07/02/2026	11:30 AM	12:30 PM	George Alexander
07/02/2026	03:00 PM	05:00 PM	Daniel Lewis
07/06/2026	09:00 AM	04:00 PM	Daniel Lewis
07/07/2026	10:00 AM	10:30 AM	Sheng-Wei Wang

Logs

	Thu, Jul 09, 2026 10:00 am - 4:00 pm Lyanne Rivera Vazquez View Reservation	Targets: Al2O3/Ag/Inconel. Please use a clean chimney for Al2O3 and preferable with an overnight pump. Also, I placed this stretch of reservation time in case there are hiccups on the tool and I do ... more
	Wed, Jul 08, 2026 10:00 am - 1:30 pm Lyanne Rivera Vazquez View Reservation	Targets: SiO2/Al2O3/Al. Please use a clean chimney for Al2O3 and preferable with an overnight pump. Also, I placed this stretch of reservation time in case there are hiccups on the tool and I do not... more
	Tue, Jul 07, 2026 10:00 am - 10:30 am Sheng-Wei Wang View Reservation	Ag,Al
	Mon, Jul 06, 2026 9:00 am - 4:00 pm Daniel Lewis View Reservation	MgO = FeO =
	Thu, Jul 02, 2026 3:00 pm - 5:00 pm Daniel Lewis View Reservation	1 hr of Mg + O, reactive

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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