DEP-01: AJA ATC 1800 Sputtering unit

July 14, 2025 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1-Ti, 2-Al2O3, 3-Al
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $140 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
07/15/2025	11:00 AM	01:45 PM	David Stewart
07/15/2025	04:30 PM	06:00 PM	Hongyi Sun

Logs

	Tue, Jul 15, 2025 4:30 pm - 6:00 pm Hongyi Sun View Reservation	Cu, Al, AlN
	Tue, Jul 15, 2025 11:00 am - 1:45 pm David Stewart View Reservation	LiPON
	Mon, Jul 14, 2025 10:15 am - 2:00 pm Lyanne Rivera Vazquez View Reservation	Ti, Al2O3, Ag
	Sat, Jul 12, 2025 2:00 pm - 5:00 pm Liuxin Gu View Reservation	anneal @250c
	Fri, Jul 11, 2025 2:00 pm - 3:00 pm Yi-Siou Huang View Reservation	Deleted by: Jonathan Hummel Si, SiO2

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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