DEP-01: AJA ATC 1800 Sputtering unit

September 20, 2026 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Ti, 2 - ITO, 3 - Cu
Please email Dr. Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $300 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Daniel Lewis
dlewis17@umd.edu
301-405-5018

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
09/21/2026	10:00 AM	11:30 AM	Hailey Crowe
09/23/2026	11:00 AM	12:00 PM	Haotong Liang

Logs

	Wed, Sep 23, 2026 11:00 am - 12:00 pm Haotong Liang View Reservation	Training with Daniel Lewis 25 nm Pt = $25
	Mon, Sep 21, 2026 10:00 am - 11:30 am Hailey Crowe View Reservation	Training with Daniel Lewis 370 nm ITO (~55 min)
	Wed, Sep 09, 2026 3:30 pm - 6:30 pm Sheng-Wei Wang View Reservation	Ti, Cu
	Fri, Sep 04, 2026 10:00 am - 12:00 pm Lyanne Rivera Vazquez View Reservation	Targets: Inconel.
	Thu, Sep 03, 2026 11:30 am - 12:30 pm Tathansh Joshi View Reservation	2 kA Pt = $200 4 kA Au = $1200 Ti Au Pt sputter on AlN carrier

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on Twitter

Links Privacy Policy
Sitemap
RSS

DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

Facilities Links