DEP-01: AJA ATC 1800 Sputtering unit

July 22, 2026 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Ti, 2 - Cu, 3 - TiNiCu
Please email Dr. Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $300 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Daniel Lewis
dlewis17@umd.edu
301-405-5018

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
07/23/2026	12:00 AM	04:00 AM	Daniel Lewis
07/23/2026	09:00 AM	02:00 PM	Sheng-Wei Wang
07/24/2026	10:00 AM	02:00 PM	Ahmed Hafez Abdelaziz
07/27/2026	11:30 AM	03:30 PM	Lyanne Rivera Vazquez

Logs

	Mon, Jul 27, 2026 11:30 am - 3:30 pm Lyanne Rivera Vazquez View Reservation	Targets: Ag/Al2O3 and new target we will be bringing in AgPd on Wednesday. Please use a clean chimney for Al2O3 and preferable with an overnight pump. Also, I placed this stretch of reservation time... more
	Fri, Jul 24, 2026 10:00 am - 2:00 pm Ahmed Hafez Abdelaziz View Reservation	TiO2 Training with Daniel Lewis
	Thu, Jul 23, 2026 9:00 am - 2:00 pm Sheng-Wei Wang View Reservation	TiNiCu, Ti, Cu
	Thu, Jul 23, 2026 - 4:00 am Daniel Lewis View Reservation	No Target Changes
	Wed, Jul 22, 2026 3:00 pm - Daniel Lewis View Reservation	No target changes, and lab environment is abnormal

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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