September 23, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Al, 2-SiO2, 3-Mo Please email Jon Hummeell at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
09/23/2018 02:00 PM 02:45 PM Heshan Yu
09/25/2018 09:00 AM 10:30 AM H M Iftekhar Jaim
Logs
Tue, Sep 25, 2018
9:00 am - 10:30 am
H M Iftekhar Jaim
View Reservation
Al2O3
Mon, Sep 24, 2018
9:00 am - 11:00 am
Benjamin Barnes
View Reservation

Deleted by: Jonathan Hummel

Sun, Sep 23, 2018
2:00 pm - 2:45 pm
Heshan Yu
View Reservation
Fri, Sep 21, 2018
9:00 am - 1:15 pm
JIANBING XU
View Reservation
Thu, Sep 20, 2018
9:00 am - 12:00 pm
JIANBING XU
View Reservation
Al, MoO3
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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