December 1, 2021 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ‚óŹ Online
Description There is a new gate valve on the load lock. Please see Jon Hummel before operating. ,p> First 2 hours of the run: $75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-ITO, 2-Al2O3, 3-Cr Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.



Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
12/03/2021 12:00 PM 09:00 AM Jonathan Hummel
Logs
Fri, Dec 03, 2021
12:00 pm - 9:00 am
Jonathan Hummel
View Reservation
Scheduled power outage of the entire Kim building.
Wed, Dec 01, 2021
9:00 am - 1:00 pm
Sam Norris
View Reservation
Al2O3, Cr, ITO
Tue, Nov 23, 2021
12:00 pm - 9:00 am
Jonathan Hummel
View Reservation
building power outage 11/26 -11/28 All tools will be shutdown starting at 12 pm 11/23 and restarted Monday morning 11/29.
Mon, Nov 22, 2021
4:15 pm - 6:15 pm
Xiangyu Mao
View Reservation
350A TiO2, 50A Al2O3, 500A Pt, $35
Mon, Nov 22, 2021
3:30 pm - 4:00 pm
Xiangyu Mao
View Reservation
Continuation of reservation sc16197dc15d4e58
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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