December 9, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Ti, 2-ZnO, 3-Cu Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
12/10/2018 07:00 AM 11:00 AM Jonathan Hummel
12/10/2018 01:00 PM 03:00 PM Lisa Krayer
12/11/2018 09:00 AM 11:00 AM H M Iftekhar Jaim
12/13/2018 09:00 AM 11:00 AM H M Iftekhar Jaim
Logs
Thu, Dec 13, 2018
9:00 am - 11:00 am
H M Iftekhar Jaim
View Reservation
Inconel
Tue, Dec 11, 2018
9:00 am - 11:00 am
H M Iftekhar Jaim
View Reservation
Al2O3, Pt, Si
Mon, Dec 10, 2018
1:00 pm - 3:00 pm
Lisa Krayer
View Reservation
Au, Ag, Ti
Mon, Dec 10, 2018
7:00 am - 11:00 am
Jonathan Hummel
View Reservation
Fri, Dec 07, 2018
7:00 am - 3:30 pm
Jonathan Hummel
View Reservation
466 wafers
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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