DEP-01: AJA ATC 1800 Sputtering unit

September 23, 2018 UMD Home FabLab AIMLab

Back to Equipment List AJA ATC 1800 Sputtering unit

Description

Targets 1-Al, 2-SiO2, 3-Mo Please email Jon Hummeell at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

UMD

$71/hr

External Non-profit / University

$108/hr

Small Commercial / MTECH

$150/hr

Large Commercial

$200/hr

Reservations

Date	Start	End	User
09/23/2018	02:00 PM	02:45 PM	Heshan Yu
09/25/2018	09:00 AM	10:30 AM	H M Iftekhar Jaim

Logs

	Tue, Sep 25, 2018 9:00 am - 10:30 am H M Iftekhar Jaim View Reservation	Al2O3
	Mon, Sep 24, 2018 9:00 am - 11:00 am Benjamin Barnes View Reservation	Deleted by: Jonathan Hummel
	Sun, Sep 23, 2018 2:00 pm - 2:45 pm Heshan Yu View Reservation
	Fri, Sep 21, 2018 9:00 am - 1:15 pm JIANBING XU View Reservation
	Thu, Sep 20, 2018 9:00 am - 12:00 pm JIANBING XU View Reservation	Al, MoO3

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

Facilities Links