October 23, 2025 UMD Home FabLab AIM Lab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ● Online
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 -Cu, 2 - Al2O3, 3 - Pt
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $140 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Oct 22, 2025
9:30 am - 11:00 am
Lyanne Rivera Vazquez
View Reservation

Deleted by: Daniel Lewis

Inc/Fe
Tue, Oct 21, 2025
1:00 pm - 2:30 pm
Lyanne Rivera Vazquez
View Reservation

Deleted by: Daniel Lewis

Tue, Oct 21, 2025
10:00 am - 12:15 pm
Lyanne Rivera Vazquez
View Reservation
Al2O3/Si. Will require overnight pump and clean chimney for Al2O3.
Fri, Oct 17, 2025
9:00 am - 11:00 am
Samuel Chen
View Reservation

Deleted by: Jonathan Hummel

Cu Al2O3
Thu, Oct 16, 2025
10:00 am - 12:00 pm
Lyanne Rivera Vazquez
View Reservation
Pt[140nm]/Si/Inconel Platinum charge=$140
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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