| Operational Status | ● Online | |||||||||||||||
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| Description |
There is a new gate valve on the load lock.
Please see Jon Hummel before operating.
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First 2 hours of the run: $75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) Targets 1-ITO, 2-Al2O3, 3-Cr Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.
Au: $82 per 1000A Pt: $70 per 1000A |
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| Location | FabLab |
DEP Tunnel
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| Manufacturer |
AJA International ATC 1800-V Link |
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| Staff Contact |
 Jonathan Hummeljhummel1@umd.edu 301 405-5017 |
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| Rates | UMD $75/hr External Non-profit / University $116/hr Small Commercial / MTECH $158/hr Large Commercial $220/hr No Charge $0/hr |
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| Reservations |
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| Logs |
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| SOPs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
