June 24, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Al, 2,Ag, 3-Au Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Jun 20, 2018
12:30 pm - 2:30 pm
Mariama Rebello de Sousa Dias
View Reservation
Al, Au
Wed, Jun 20, 2018
10:45 am - 12:30 pm
Lisa Krayer
View Reservation
Ag
Tue, Jun 19, 2018
1:00 pm - 3:30 pm
Jake Ballard
View Reservation
LiCoO2
Tue, Jun 19, 2018
11:45 am - 1:00 pm
Joseph Murray
View Reservation
Nb
Mon, Jun 18, 2018
2:00 pm - 3:30 pm
Blake Nuwayhid
View Reservation
Ti, Pt 1500 angstroms $105
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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