August 19, 2022 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ‚óŹ Online
Description ,p> First 2 hours of the run: $75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-Ag, 2-Al2O3, 3-Inconel Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.



Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Aug 16, 2022
10:30 am - 11:30 am
Xiechen Zheng
View Reservation
Ag, SiO2
Thu, Aug 11, 2022
12:00 pm - 1:00 pm
Sam Norris
View Reservation
Fe, Inconel, Al2O3
Wed, Aug 10, 2022
9:00 am - 1:00 pm
Peter Snapp
View Reservation
SnO2, Pt
Tue, Aug 09, 2022
2:00 pm - 2:30 pm
Sarit Zhukovsky
View Reservation
10 nm Au
Thu, Aug 04, 2022
5:00 pm - 6:00 pm
Liuxin Gu
View Reservation
Pt100nm/Ag500nm Platinum charge=$70
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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