January 16, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Ag, 2-SiO2, 3-Au Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Fri, Jan 12, 2018
1:00 pm - 3:00 pm
Chen Gong
View Reservation
Ag
Thu, Jan 11, 2018
1:00 pm - 1:45 pm
Heshan Yu
View Reservation
Wed, Jan 10, 2018
1:30 pm - 2:15 pm
Heshan Yu
View Reservation
SiO2
Tue, Jan 09, 2018
10:00 am - 10:45 am
Heshan Yu
View Reservation
Mon, Jan 08, 2018
1:00 pm - 2:30 pm
Heshan Yu
View Reservation
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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