September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List MJB-3 Mask aligner- right of spin station #1
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
Location FabLab | Teaching Lab
Manufacturer Karl Suss America Inc. MJB-3
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
09/30/2020 12:00 PM 03:30 PM Mark Lecates
Logs
Wed, Sep 30, 2020
12:00 pm - 3:30 pm
Mark Lecates
View Reservation
416 class
Mon, Sep 28, 2020
9:30 am - 11:30 am
Bo Miao
View Reservation
tom
Fri, Sep 25, 2020
1:30 pm - 2:00 pm
Bo Miao
View Reservation
tom
Fri, Sep 25, 2020
8:30 am - 12:00 pm
Thomas Loughran
View Reservation
ENEE 416
Thu, Sep 24, 2020
1:00 pm - 3:00 pm
Bo Miao
View Reservation
Records to show:
SOPs
Photo-03 - SOP - MJB-3 Mask Aligner.pdf (64.6 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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