March 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List MJB-3 Mask aligner- right of spin station
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
Location FabLab | Teaching Lab
Manufacturer Karl Suss America Inc. MJB-3
Staff Contact JohnJohn Abrahams
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
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Tue, Mar 13, 2018
5:45 pm - 6:30 pm
Tarapada Sarkar
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Fri, Mar 09, 2018
9:00 am - 12:00 pm
Mark Lecates
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465 class
Wed, Mar 07, 2018
1:00 pm - 1:15 pm
Aysanew Abate
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Wed, Mar 07, 2018
9:00 am - 12:00 pm
Mark Lecates
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465 class
Thu, Mar 01, 2018
9:30 am - 9:45 am
David Shahin
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Records to show:
Photo-03 - SOP - MJB-3 Mask Aligner.pdf (64.6 KB)
index.php (38 B)

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