August 19, 2022 UMD Home FabLab AIMLab
MJB-3 Mask aligner- right of spin station #1 Back to Equipment List
Operational Status ‚óŹ Online
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
Location FabLab | Teaching Lab
Manufacturer Karl Suss America Inc. MJB-3
Staff Contact JohnJohn Abrahams
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Thu, Aug 18, 2022
1:30 pm - 2:00 pm
Yun Suk Eo
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Thu, Aug 18, 2022
12:00 pm - 12:15 pm
Daniel Lewis
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Thu, Aug 18, 2022
11:45 am - 12:00 pm
Haotian Wang
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Wed, Aug 17, 2022
3:00 pm - 3:15 pm
Haotian Wang
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Mon, Aug 08, 2022
2:30 pm - 3:30 pm
Maya Amouzegar
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Records to show:
Photo-03 - SOP - MJB-3 Mask Aligner.pdf (64.6 KB)
index.php (38 B)

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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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