December 1, 2021 UMD Home FabLab AIMLab
MJB-3 Mask aligner- right of spin station #1 Back to Equipment List
Operational Status ‚óŹ Online
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
Location FabLab | Teaching Lab
Manufacturer Karl Suss America Inc. MJB-3
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Nov 19, 2021
4:45 pm - 5:00 pm
JIHUN PARK
View Reservation
Wed, Nov 17, 2021
7:15 am - 8:00 am
Benjamin Barnes
View Reservation
Tue, Nov 09, 2021
9:00 am - 11:00 am
Mark Lecates
View Reservation
Thu, Nov 04, 2021
1:30 pm - 1:45 pm
Benjamin Barnes
View Reservation
Wed, Nov 03, 2021
9:00 am - 12:00 pm
Mark Lecates
View Reservation
Records to show:
SOPs
Photo-03 - SOP - MJB-3 Mask Aligner.pdf (64.6 KB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2021