August 19, 2022 UMD Home FabLab AIMLab
Metra Thermal Evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
08/19/2022 09:30 AM 02:00 PM Cory Bomberger
Logs
Fri, Aug 19, 2022
9:30 am - 2:00 pm
Cory Bomberger
View Reservation
Tue, Aug 16, 2022
11:30 am - 1:30 pm
Shanchuan Liang
View Reservation
Cr 5nm+ Au 60 nm Gold charge=$55.20
Fri, Aug 12, 2022
10:30 am - 3:30 pm
Cory Bomberger
View Reservation
Wed, Aug 10, 2022
6:15 pm - 9:00 pm
Qinqin Wang
View Reservation
cr/au 5 nm/50 nm Gold charge=$46
Wed, Aug 10, 2022
12:00 pm - 5:00 pm
Diana Lutz
View Reservation
Deposition of metal onto ceramic
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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