May 1, 2025 UMD Home FabLab AIMLab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Thu, May 01, 2025
7:30 am - 9:00 am
Yixiao Wang
View Reservation
Overnight Pump 10nm Cr+70nm Au = $77
Thu, May 01, 2025
7:00 am - 8:30 am
Yixiao Wang
View Reservation

Deleted by: Yixiao Wang

5nm Cr+70 nm Au = $77
Wed, Apr 30, 2025
10:30 pm -
Yixiao Wang
View Reservation

Deleted by: Yixiao Wang

Overnight pump
Wed, Apr 30, 2025
1:00 pm - 2:30 pm
Rundong Ma
View Reservation
Wed, Apr 30, 2025
7:00 am - 8:30 am
Yixiao Wang
View Reservation
Cr 5 nm + Au 50 nm = $55
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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