December 9, 2018 UMD Home FabLab AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Dec 07, 2018
3:00 pm - 5:00 pm
Peng Wang
View Reservation

Deleted by: Peng Wang

Tue, Dec 04, 2018
3:00 pm - 4:00 pm
Chen-Yu Chen
View Reservation
Deposit gold on wafers
Mon, Dec 03, 2018
4:00 pm - 5:00 pm
Chen-Yu Chen
View Reservation

Deleted by: Chen-Yu Chen

wafer deposit with gold
Fri, Nov 30, 2018
4:00 pm - 6:00 pm
YANGYI YAO
View Reservation
Fri, Nov 16, 2018
3:30 pm - 5:30 pm
YANGYI YAO
View Reservation
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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