July 15, 2025 UMD Home FabLab AIM Lab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Jul 11, 2025
10:30 am - 1:30 pm
Stefan Theodoru
View Reservation
50 nm Au = $70
Fri, Jul 11, 2025
7:00 am - 10:00 am
Stefan Theodoru
View Reservation
60nm Au Gold charge=$84
Thu, Jul 10, 2025
3:30 pm - 5:30 pm
Soumadeep Saha
View Reservation
Cr(5nm)/Au(70nm) Gold charge=$98
Wed, Jul 09, 2025
6:30 pm - 9:30 pm
Shanchuan Liang
View Reservation
Cr/Au 5/50 nm Gold charge=$70
Wed, Jul 09, 2025
2:00 pm - 3:30 pm
Liuxin Gu
View Reservation
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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