December 10, 2025 UMD Home FabLab AIM Lab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
12/10/2025 03:30 PM 05:30 PM Soumadeep Saha
12/12/2025 09:00 AM 11:30 AM Bisweswar Patra
Logs
Fri, Dec 12, 2025
9:00 am - 11:30 am
Bisweswar Patra
View Reservation
Cr Cu
Wed, Dec 10, 2025
3:30 pm - 5:30 pm
Soumadeep Saha
View Reservation
Cr(5nm)/ Au( 100 nm)
Mon, Dec 08, 2025
5:00 pm - 7:00 pm
Joshua Wang
View Reservation
Au thickness: 30 nm = $60
Mon, Dec 08, 2025
10:45 am - 12:15 pm
Linfeng Ai
View Reservation
Cr 5nm+Au 30nm ($60)
Sun, Dec 07, 2025
11:15 am - 12:45 pm
Linfeng Ai
View Reservation

Deleted by: Daniel Lewis

5nm Cr+ 30nm Au ($60)
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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