April 7, 2026 UMD Home FabLab AIM Lab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Apr 07, 2026
9:00 am - 11:30 am
Kwangsu Kim
View Reservation
Cr/Au 40nm $120
Mon, Apr 06, 2026
3:00 pm - 5:00 pm
Shanchuan Liang
View Reservation
Cr/Au 5/50nm Gold charge=$120
Thu, Apr 02, 2026
7:30 pm - 9:00 pm
Ti Xie
View Reservation
Cr/Au 5/30 nm 72$
Mon, Mar 23, 2026
7:00 pm - 9:00 pm
Shanchuan Liang
View Reservation
Cr/Au 5/50 nm Gold charge=$120
Wed, Mar 18, 2026
4:00 pm - 6:00 pm
Shanchuan Liang
View Reservation
Cr/Au (10/90 nm) Gold charge=$216
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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