|Operational Status||● Online|
The single-tube CVD furnace is used for growing gate oxide, poly silicon, spin on glass dopant drive-in and contact anneals. Different tubes are used for different processes.
This furnace is for the use of FabLab staff only.
|Location||FabLab | CVD Tunnel|
External Non-profit / University
Small Commercial / MTECH
|Reservations||No upcoming reservations at this time.|
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