November 7, 2024 UMD Home FabLab AIMLab
LP-CVD Furnace Back to Equipment List
Operational Status ● Offline
Description The single-tube CVD furnace is used for growing gate oxide, poly silicon, spin on glass dopant drive-in and contact anneals. Different tubes are used for different processes.

This furnace is for the use of FabLab staff only.
Location FabLab | CVD Tunnel
Manufacturer CVD Systems
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Sun, Oct 15, 2023
6:45 pm - 7:15 pm
Nam Kim
View Reservation
Wed, Jun 21, 2023
2:00 pm - 3:00 pm
Celine Oh
View Reservation

Deleted by: Nam Kim

With Nam
Tue, Jan 03, 2012
11:00 am - 12:00 pm
Chuanfu Sun
View Reservation
Thu, Dec 15, 2011
9:30 am - 2:00 pm
Chuanfu Sun
View Reservation

Deleted by: Chuanfu Sun

Wed, Dec 14, 2011
9:45 am - 2:00 pm
Chuanfu Sun
View Reservation
Records to show:
SOPs
cvd-05_sop.pdf (270.21 KB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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