| Operational Status | ● Offline | |||||||||||||||
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| Description |
The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples.
It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light.
It is used with a variety of both positive and negative photoresists.
Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
A backside alignment option is available, allowing the registration of front side to backside masks, for creating three-dimensional structures. |
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| Location | FabLab |
Photo Tunnel
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| Manufacturer |
Karl Suss America Inc. MJB-3 w/ Backside |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | UMD $75/hr External Non-profit / University $116/hr Small Commercial / MTECH $158/hr Large Commercial $220/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
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| SOPs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes | Photoresist ProcessesAZ4620_process.doc (25.5 KB)NPR9 process.doc (24.5 KB) NR9-1500PY.pdf (88.62 KB) SPR220_resist_process.doc (25.5 KB) baseline_shipley_1813_resist_chlorobenzene_lift.doc (28 KB) chlorobenzene_lift.doc (28.5 KB) photo_resist_pouring_procedure.doc (24 KB) shipley_1813_positive_photolithography_process.doc (27 KB) |
