December 1, 2021 UMD Home FabLab AIMLab
MJB-3 Mask dual side aligner Fab Lab #3 Back to Equipment List
Operational Status ‚óŹ Offline
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below. A backside alignment option is available, allowing the registration of front side to backside masks, for creating three-dimensional structures.
Location FabLab | Photo Tunnel
Manufacturer Karl Suss America Inc. MJB-3 w/ Backside
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Oct 01, 2021
9:00 am - 12:00 pm
Thomas Loughran
View Reservation
Tue, Sep 14, 2021
1:00 pm - 2:00 pm
JIHUN PARK
View Reservation
Wed, Mar 03, 2021
10:00 am - 11:00 am
Stefan Theodoru
View Reservation
Mon, Sep 21, 2020
9:00 am - 10:30 am
Haotian Wang
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tom
Tue, Oct 15, 2019
8:45 am - 12:00 pm
Mark Lecates
View Reservation
Records to show:
SOPs
Photo-04 - SOP - MJB-3 Mask Aligner.pdf (1.18 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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