Working with wet chemicals can be hazardous if you don't follow the proper procedures at all times.
Violating procedure risks not only your health but also the health and safety of other users and may result in loss of access to FabLab for an extended period of time.
Please read and understand the Materials Safety Data Sheets (MSDS) for all of the chemicals you will be using. Copies are in a binder in the Change Room or you can find them online at http://www.msdssearch.com/find.htm or from the vendor.
|Location||FabLab | ETCH Tunnel|
External Non-profit / University
Small Commercial / MTECH
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Wet Etch Recipescolor_chart_for_SiO2_film_thickness.doc (86 KB)
etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf (1.02 MB)
seminconductor_processing_recipes.doc (37.5 KB)
silicon_etching_and_cleaning.doc (176 KB)
wet_etch_121500.pdf (13.43 KB)