January 17, 2018 UMD Home FabLab AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Tue, Jan 16, 2018
11:30 am - 2:30 pm
Zackery Benson
View Reservation
Mg/MgO
Fri, Jan 12, 2018
10:30 am - 1:00 pm
Zackery Benson
View Reservation

Deleted by: Zackery Benson

Mg/MgO
Fri, Jan 12, 2018
8:00 am - 10:00 am
Xinyuan Chong
View Reservation
Thu, Jan 11, 2018
5:30 pm - 8:30 pm
Xinyuan Chong
View Reservation
3/60 nm Ti/Au Charge = $37.8
Thu, Jan 11, 2018
2:00 pm - 4:00 pm
Zackery Benson
View Reservation
Ag
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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