December 1, 2021 UMD Home FabLab AIMLab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ‚óŹ Waiting for part/service
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $82 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Fri, Nov 12, 2021
Thomas Loughran
View Reservation
Mon, Aug 02, 2021
10:30 am - 1:00 pm
Kunal Ahuja
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Deleted by: Thomas Loughran

1.0 um of Al.
Thu, Jul 29, 2021
9:30 am - 11:30 am
Kit Pan Wong
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Deleted by: Thomas Loughran

Mon, Jul 26, 2021
8:00 am - 10:00 am
Keith Gregorczyk
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Al deposition
Sun, Jul 25, 2021
4:15 pm - 5:45 pm
Ti Xie
View Reservation
10nm ITO
Records to show:
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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