December 9, 2018 UMD Home FabLab AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 100nm Pt: $70 per 100nm, Pd: $50 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
12/10/2018 07:00 AM 04:00 PM Thomas Loughran
Logs
Mon, Dec 10, 2018
7:00 am - 4:00 pm
Thomas Loughran
View Reservation
Boron deposition.
Thu, Dec 06, 2018
2:00 pm - 4:00 pm
Heshan Yu
View Reservation

Deleted by: Mark Lecates

gold 50nm
Wed, Dec 05, 2018
12:00 pm - 2:30 pm
Thomas Farinha
View Reservation
50 nm Mg on Si/Glass
Wed, Dec 05, 2018
7:30 am - 10:30 am
Thomas Loughran
View Reservation
Al deposition test.
Wed, Dec 05, 2018
- 12:00 pm
Thomas Loughran
View Reservation

Deleted by: Thomas Loughran

Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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