December 1, 2021 UMD Home FabLab AIMLab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ‚óŹ Waiting for part/service
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $82 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Nov 12, 2021
-
Thomas Loughran
View Reservation
Mon, Aug 02, 2021
10:30 am - 1:00 pm
Kunal Ahuja
View Reservation

Deleted by: Thomas Loughran

1.0 um of Al.
Thu, Jul 29, 2021
9:30 am - 11:30 am
Kit Pan Wong
View Reservation

Deleted by: Thomas Loughran

Mon, Jul 26, 2021
8:00 am - 10:00 am
Keith Gregorczyk
View Reservation
Al deposition
Sun, Jul 25, 2021
4:15 pm - 5:45 pm
Ti Xie
View Reservation
10nm ITO
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2021