March 28, 2024 UMD Home FabLab AIMLab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ● Online
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source Handles up to 4" diameter substrates Substrate heating to 300 C O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
04/01/2024 09:00 AM 11:30 AM Thomas Loughran
Logs
Mon, Apr 01, 2024
9:00 am - 11:30 am
Thomas Loughran
View Reservation
Tue, Mar 26, 2024
9:00 am - 11:00 am
Amirehsan Alizadehherfati
View Reservation
Gold charge. $92.00
Mon, Mar 25, 2024
10:00 am - 11:30 am
Liuxin Gu
View Reservation
900A gold charge. $83.60
Mon, Mar 25, 2024
9:00 am - 2:00 pm
Thomas Loughran
View Reservation

Deleted by: Thomas Loughran

Fri, Mar 22, 2024
7:00 am - 12:00 pm
Thomas Loughran
View Reservation
chamber clean
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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