September 23, 2018 UMD Home FabLab AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 100nm Pt: $70 per 100nm, Pd: $50 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
09/24/2018 10:30 AM 12:30 PM Thomas Farinha
Logs
Mon, Sep 24, 2018
10:30 am - 12:30 pm
Thomas Farinha
View Reservation
Mg deposition on templated glass
Wed, Sep 19, 2018
7:30 pm - 10:00 pm
Keshav Rajasekaran
View Reservation
Wed, Sep 19, 2018
2:15 pm - 4:15 pm
Kevin Palm
View Reservation
Mg
Thu, Aug 02, 2018
1:00 pm - 4:00 pm
Matt DeJarld
View Reservation

Deleted by: Matt DeJarld

Ni-10nm
Thu, Aug 02, 2018
10:30 am - 12:30 pm
Thomas Farinha
View Reservation
300 nm Mg on glass
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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