August 19, 2022 UMD Home FabLab AIMLab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Sat, Jul 09, 2022
5:00 pm - 6:30 pm
Ti Xie
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Cr 6nm
Fri, Jul 01, 2022
10:30 am - 1:00 pm
Deric Session
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Deleted by: Deric Session

3nm Cr + 50nm Au = $46
Mon, Jun 20, 2022
2:30 pm - 3:30 pm
Heshan Yu
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Wed, Jun 15, 2022
3:30 pm - 4:30 pm
Heshan Yu
View Reservation
Wed, Jun 01, 2022
3:30 pm - 5:00 pm
Heshan Yu
View Reservation
Records to show:
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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