October 10, 2024 UMD Home FabLab AIMLab
Raith e_LiNE Back to Equipment List
Operational Status ● Online
Description The Raith e_line is a versatile e-beam system for nano structuring, patterning and imaging using a Thermal Field Emission filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides that can range over multiple millimeter distances. The electron column has a unique cross over free beam path that give high beam current and exceedingly low aberrations for top quality patterning and unsurpassed low voltage imaging even below 1keV.

For runs longer than 4-5 hours please start your run in the evening and let it run over night.

Location FabLab | Exploratory Lab SEM room
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$47/hr
External Non-profit / University
$73/hr
Small Commercial / MTECH
$103/hr
Large Commercial
$182/hr
No Charge
$0/hr
Reservations
Date Start End User
10/11/2024 09:00 AM 10:30 AM Xiaodong Zhao
Logs
Fri, Oct 11, 2024
9:00 am - 10:30 am
Xiaodong Zhao
View Reservation
Thu, Oct 10, 2024
4:00 pm - 8:00 pm
Shuhan Liu
View Reservation
Thu, Oct 10, 2024
9:15 am - 9:30 am
Shuhan Liu
View Reservation
Unload sample
Wed, Oct 09, 2024
7:00 pm - 10:00 pm
Shuhan Liu
View Reservation
Wed, Oct 09, 2024
9:00 am - 10:30 am
Madeline McGee
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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