December 2, 2022 UMD Home FabLab AIMLab
Raith e_LiNE Back to Equipment List
Operational Status ‚óŹ Online
Description The Raith e_line is a versatile e-beam system for nano structuring, patterning and imaging using a Thermal Field Emission filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides that can range over multiple millimeter distances. The electron column has a unique cross over free beam path that give high beam current and exceedingly low aberrations for top quality patterning and unsurpassed low voltage imaging even below 1keV.

For runs longer than 4-5 hours please start your run in the evening and let it run over night.

Location FabLab | Exploratory Lab SEM room
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$43/hr
External Non-profit / University
$66/hr
Small Commercial / MTECH
$98/hr
Large Commercial
$165/hr
No Charge
$0/hr
Reservations
Date Start End User
12/02/2022 02:00 PM 04:00 PM Ziyi Wang
Logs
Fri, Dec 02, 2022
2:00 pm - 4:00 pm
Ziyi Wang
View Reservation
Thu, Dec 01, 2022
12:00 pm - 2:00 pm
Daniel Lewis
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Thu, Dec 01, 2022
10:30 am - 11:30 am
Daniel Lewis
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Tue, Nov 29, 2022
3:00 pm - 4:00 pm
Daniel Lewis
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Deleted by: Daniel Lewis

Tue, Nov 29, 2022
2:00 pm - 3:00 pm
Lifu Zhang
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Records to show:
SOPs
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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