July 9, 2020 UMD Home FabLab AIMLab
Back to Equipment List Raith e_LiNE
Description The Raith e_line is a versatile e-beam system for nano structuring, patterning and imaging using a Thermal Field Emission filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides that can range over multiple millimeter distances. The electron column has a unique cross over free beam path that give high beam current and exceedingly low aberrations for top quality patterning and unsurpassed low voltage imaging even below 1keV.

For runs longer than 4-5 hours please start your run in the evening and let it run over night.

Location FabLab | Exploratory Lab SEM room
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$41/hr
External Non-profit / University
$63/hr
Small Commercial / MTECH
$93/hr
Large Commercial
$150/hr
Reservations
Date Start End User
07/10/2020 10:30 AM 12:30 PM Kungang Li
07/14/2020 10:00 AM 02:00 PM JAYAPRAKASH POOJALI
Logs
Tue, Jul 14, 2020
10:00 am - 2:00 pm
JAYAPRAKASH POOJALI
View Reservation
Fri, Jul 10, 2020
10:30 am - 12:30 pm
Kungang Li
View Reservation
Abrahams-
Thu, Jul 09, 2020
10:00 am - 2:45 pm
JAYAPRAKASH POOJALI
View Reservation
Wed, Jul 08, 2020
12:00 pm - 1:45 pm
Kungang Li
View Reservation
mark
Tue, Jul 07, 2020
9:45 am - 10:45 am
JAYAPRAKASH POOJALI
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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