June 2, 2023 UMD Home FabLab AIMLab
Raith e_LiNE Back to Equipment List
Operational Status ‚óŹ Online
Description The Raith e_line is a versatile e-beam system for nano structuring, patterning and imaging using a Thermal Field Emission filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides that can range over multiple millimeter distances. The electron column has a unique cross over free beam path that give high beam current and exceedingly low aberrations for top quality patterning and unsurpassed low voltage imaging even below 1keV.

For runs longer than 4-5 hours please start your run in the evening and let it run over night.

Location FabLab | Exploratory Lab SEM room
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
301 405-5017
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Fri, Jun 02, 2023
11:45 am - 2:00 pm
Jonathan Hummel
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Wed, May 31, 2023
5:30 pm - 6:15 pm
Shanchuan Liang
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Wed, May 31, 2023
4:00 pm - 5:00 pm
Qinqin Wang
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Wed, May 31, 2023
2:15 pm - 3:15 pm
Shanchuan Liang
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Wed, May 31, 2023
10:00 am - 11:30 am
Rachit Sood
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Records to show:
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)

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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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