August 19, 2022 UMD Home FabLab AIMLab
Raith off line computer Back to Equipment List
Operational Status ● Online
Description

The RAITH eLine Direct Write Ebeam System is FabLab’s primary choice for ultra high resolution patterning, while handling up to 4 inch wafers. For complex applications using masks and wafers, there are sophisticated options like height sensing and leveling, which keep the sample in focus even over these large travel ranges, and field stitching for large area patterns. The ultimate linewidth resolution of this tool is less than 20 nm.

The Raith Offline Computer is available for users to edit their write routines without tying up the Raith eLine system.

There is no charge for Raith e_Line users for using this computer in conjunction with the e_Line system. Others using the offline computer for designs for other tools will be charged for use of this computer.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$10/hr
External Non-profit / University
$12/hr
Small Commercial / MTECH
$15/hr
Large Commercial
$25/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Aug 11, 2022
11:30 am - 12:00 pm
Bibek Ramdam
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Raith user
Thu, Aug 11, 2022
9:00 am - 9:30 am
Daniel Lewis
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Tue, Aug 09, 2022
12:15 pm - 2:30 pm
Hyun-Tae Kim
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Fri, Aug 05, 2022
9:00 am - 10:00 am
Nam Kim
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Deleted by: Nam Kim

Mon, Aug 01, 2022
10:15 am - 10:45 am
Nam Kim
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Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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