June 30, 2025 UMD Home FabLab AIM Lab
Raith off line computer Back to Equipment List
Operational Status ● Online
Description

The RAITH eLine Direct Write Ebeam System is FabLab’s primary choice for ultra high resolution patterning, while handling up to 4 inch wafers. For complex applications using masks and wafers, there are sophisticated options like height sensing and leveling, which keep the sample in focus even over these large travel ranges, and field stitching for large area patterns. The ultimate linewidth resolution of this tool is less than 20 nm.

The Raith Offline Computer is available for users to edit their write routines without tying up the Raith eLine system.

There is no charge for Raith e_Line users for using this computer in conjunction with the e_Line system. Others using the offline computer for designs for other tools will be charged for use of this computer.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
Large Commercial
$25/hr
Small Commercial / MTECH
$15/hr
External Non-profit / University
$12/hr
UMD
$10/hr
Reservations No upcoming reservations at this time.
Logs
Fri, May 30, 2025
1:00 pm - 3:00 pm
Harold Park
View Reservation
Raith user
Wed, May 28, 2025
12:15 pm - 12:45 pm
Bibek Ramdam
View Reservation
Raith user
Mon, May 26, 2025
2:30 pm - 4:00 pm
Bibek Ramdam
View Reservation
Raith user
Sat, May 24, 2025
5:45 pm - 8:30 pm
Yixiao Wang
View Reservation

Deleted by: Yixiao Wang

Tue, May 13, 2025
4:00 pm - 5:00 pm
Harold Park
View Reservation
Used to get time estimate of dose testing for source and drain contacts, using Raith E-Line.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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