March 18, 2018 UMD Home FabLab AIMLab
Description The HEATPULSE 410 and 610 are rapid thermal processor systems which use high intensity visible radiation to heat single substrates for short periods (typically 1-6,000 seconds although up to 9,999 seconds is available) at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
  • An extensive library of proven recipes
AG Associates model 410 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 800 degrees Celsius or Pyrometer above 800.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact JohnJohn Abrahams
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Wed, Mar 14, 2018
11:15 am - 12:30 pm
David Shahin
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1 hour purge before run
Mon, Mar 12, 2018
5:30 pm - 6:45 pm
David Shahin
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1 hr purge before anneal
Mon, Mar 12, 2018
1:00 pm - 2:15 pm
David Shahin
View Reservation
1 hour purge
Fri, Mar 09, 2018
12:45 pm - 2:30 pm
David Shahin
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1 hour chamber purge before RTA run
Fri, Jan 19, 2018
12:45 pm - 1:00 pm
Aysanew Abate
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Records to show:
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)

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