|Operational Status||● Online|
The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
|Location||FabLab | CVD Tunnel|
AG Associated 610
External Non-profit / University
Small Commercial / MTECH
|Reservations||No upcoming reservations at this time.|
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