September 28, 2020 UMD Home FabLab AIMLab
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 410 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 800 degrees Celsius or Pyrometer above 800.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact JohnJohn Abrahams
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Thu, Jul 23, 2020
9:30 am - 10:00 am
Aysanew Abate
View Reservation
Tue, Mar 17, 2020
5:30 pm - 6:00 pm
Sandesh Kalantre
View Reservation
Mon, Mar 09, 2020
2:00 pm - 2:30 pm
Sandesh Kalantre
View Reservation
Fri, Mar 06, 2020
2:15 pm - 2:45 pm
Sandesh Kalantre
View Reservation
Wed, Mar 04, 2020
8:30 am - 9:00 am
Kham Inboune
View Reservation
RTA @ 700C
Records to show:
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland