August 19, 2022 UMD Home FabLab AIMLab
Operational Status ‚óŹ Online
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 410 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 800 degrees Celsius or Pyrometer does NOT work so no runs above 800.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Aug 11, 2022
1:30 pm - 1:45 pm
Brett Setera
View Reservation
Fri, Jul 22, 2022
11:30 am - 11:45 am
Brett Setera
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Tue, Jun 07, 2022
1:00 pm - 2:00 pm
Fariba Islam
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Tue, Mar 08, 2022
1:00 pm - 2:00 pm
Liuxin Gu
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Training on RTA for anneal
Thu, Feb 17, 2022
10:00 am - 10:15 am
John Hoerauf
View Reservation
Training John Hoerauf
Records to show:
SOPs
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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