March 18, 2018 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Wed, Mar 07, 2018
8:00 am - 11:00 am
Stoyan Jeliazkov
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Thermal wet oxide growth at 950C for 3-hours
Mon, Mar 05, 2018
10:00 am - 1:00 pm
Stoyan Jeliazkov
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Thermal wet oxide at 950C for 3-hours.
Mon, Feb 26, 2018
12:00 pm - 1:00 pm
Angelique Jarry
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5000A of thermal wet oxide.
Fri, Feb 23, 2018
7:00 am - 8:00 am
Thomas Loughran
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Dry oxide growth for Luke Robertson.
Wed, Feb 14, 2018
7:00 am - 8:30 am
Shangjie Yu
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500A of dry oxide on 25, 4" Si wafers.
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