January 17, 2018 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$300/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Fri, Jan 12, 2018
10:30 am - 11:00 am
Yiwen Hu
View Reservation
400A of ST Nitride on 2, 4" wafers with thermal oxide.
Fri, Jan 12, 2018
7:30 am - 8:00 am
Zhili Yang
View Reservation
1000A of Nitride.
Thu, Jan 11, 2018
10:00 am - 11:00 am
Jessie Zhang
View Reservation
500A of LS Nitride on 5, 4" Si wafers
Fri, Jan 05, 2018
10:00 am - 11:00 am
Yang Zhang
View Reservation
1000A of std nitride on 2, silicon wafers.
Thu, Jan 04, 2018
1:00 pm - 2:00 pm
Xinyuan Chong
View Reservation
5000A of thermal wet oxide.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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