December 12, 2018 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Dec 06, 2018
10:00 am - 11:45 am
Mitchell Gross
View Reservation
2.0um of poly on 1, Si wafer.
Thu, Dec 06, 2018
7:00 am - 7:30 am
Subhojit Dutta
View Reservation
3000A of wet oxide on 1, 4" Si wafer
Mon, Dec 03, 2018
10:30 am - 11:30 am
Yang Zhang
View Reservation
1000A of Si3N4 on 2, 4"Si wafers with thermal oxide.
Fri, Nov 30, 2018
8:00 am - 9:00 am
Chen-Yu Chen
View Reservation
5000A of thermal wet oxide on 12, 4" Si wafers.
Thu, Nov 15, 2018
10:00 am - 11:00 am
Harjot Singh
View Reservation
1300A of STD Nitride.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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