September 28, 2020 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Sep 24, 2020
7:00 am - 9:00 am
Haotian Wang
View Reservation
tom
Tue, Sep 22, 2020
8:00 am - 11:00 am
Harsimranjit Singh
View Reservation
1.0 um of thermal wet oxide. Tom
Thu, Sep 10, 2020
8:00 am - 8:45 am
Shengjie Xie
View Reservation
1000A of Nitride. Tom
Wed, Sep 09, 2020
9:00 am - 10:00 am
Jiahao Zhan
View Reservation
tom
Wed, Sep 02, 2020
11:00 am - 12:30 pm
Haotian Wang
View Reservation
5000A of thermal wet oxide on 4, 4" Si wafers.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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