CVD-06: Tystar CVD

June 25, 2018 UMD Home FabLab AIMLab

Description

The Tystar furnace has three dedicated tubes for the growth/deposition of:

gate-quality silicon dioxide
LPCVD polysilicon
LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.

Location

FabLab | CVD Tunnel

Manufacturer

Tystar Tytan
Link

Staff Contact

Thomas Loughran
tcl@umd.edu
301-405-3642

Rates

UMD

$71/hr

External Non-profit / University

$108/hr

Small Commercial / MTECH

$150/hr

Large Commercial

$300/hr

Reservations

No upcoming reservations at this time.

Logs

	Tue, Jun 19, 2018 10:00 am - 11:00 am Angelique Jarry View Reservation	Nitride deposition on 10, 3" Si wafers
	Thu, Jun 14, 2018 9:30 am - 11:00 am Pengke Li View Reservation	1000A of dry oxide on 5, 2" Silicon wafers
	Wed, Jun 06, 2018 11:00 am - 12:30 pm Yang Zhang View Reservation	3000A of STNIT on 2 wafers
	Wed, May 09, 2018 10:00 am - 11:30 am Christos Tengeris View Reservation	1000A of thermal dry oxide on 10, 3" Silicon wafers.
	Wed, Mar 07, 2018 8:00 am - 11:00 am Stoyan Jeliazkov View Reservation	Thermal wet oxide growth at 950C for 3-hours

SOPs

Manuals

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Recipes

CVD-06: Tystar CVD

Facilities Links