August 19, 2022 UMD Home FabLab AIMLab
Operational Status ‚óŹ Online
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Thu, Aug 04, 2022
7:30 am - 9:30 am
Haotian Wang
View Reservation
5000A of thermal wet oxide.
Mon, Aug 01, 2022
8:00 am - 6:00 pm
Richard Fu
View Reservation
1.0 um of LSNITRIDE
Mon, Jul 25, 2022
11:00 am - 1:00 pm
Oded Rabin
View Reservation
1000A of Silicon Nitride on 7, 3" Silicon wafers
Fri, Jul 22, 2022
7:00 am - 10:00 am
Richard Fu
View Reservation
5000A of low stress Silicon Nitride.
Thu, Jul 07, 2022
9:00 am - 11:00 am
Haotian Wang
View Reservation
2000A of poly.
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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