June 30, 2025 UMD Home FabLab AIM Lab
Operational Status ● In maintenance
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Jun 27, 2025
9:00 am - 11:00 am
Michael Hinshelwood
View Reservation
Fri, Jun 20, 2025
11:00 am - 2:00 pm
Michael Hinshelwood
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1.0um oxide
Tue, Jun 17, 2025
2:00 pm - 5:00 pm
Robert Henry
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1.0 um of thermal wet oxide
Mon, May 12, 2025
10:30 am - 3:00 pm
Jonathan Hummel
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Burnbox Maintenance
Mon, Mar 10, 2025
10:00 am - 12:00 pm
Thomas Dymowski
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Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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