July 9, 2020 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Jul 01, 2020
10:45 am - 12:30 pm
Aysanew Abate
View Reservation

Deleted by: Mark Lecates

Abrahams-
Thu, Mar 12, 2020
7:00 am - 8:00 am
Alexander Kozen
View Reservation
5000A of thermal wet oxide.
Wed, Mar 11, 2020
1:00 pm - 2:00 pm
Alexander Kozen
View Reservation
5000A of thermal wet oxide on 25, 3" Si wafers.
Tue, Mar 03, 2020
10:00 am - 11:00 am
Aysanew Abate
View Reservation
4000A of poly + pilot wafer
Thu, Feb 20, 2020
6:00 am - 7:00 am
Jennette Mateo
View Reservation
3000A of thermal wet oxide.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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