September 21, 2018 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$300/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Sep 11, 2018
9:00 am - 10:00 am
Yang Zhang
View Reservation
1000A of STNITRIDE on 2, 4" Si/SiO2 wafers
Fri, Aug 17, 2018
7:00 am - 7:30 am
Mitchell Gross
View Reservation
4000A of 650C poly Silicon.
Tue, Aug 14, 2018
12:00 pm - 2:30 pm
Keith Gregorczyk
View Reservation
5000A of Nitride on 25, 3" Si wafers
Thu, Aug 09, 2018
11:00 am - 1:00 pm
Jessie Zhang
View Reservation
N2 30 min anneal on 3 wafers and a dry/wet/dry oxidation growth on 2 wafers
Tue, Jul 31, 2018
9:00 am - 9:30 am
Jiahao Zhan
View Reservation
1000A of ST Si3N4
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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