| Operational Status | ● Online | |||||||||||||||
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| Description |
The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only. 30 minute minimum charge |
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| Location | FabLab |
CVD Tunnel
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| Manufacturer |
Tystar Tytan Link |
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| Staff Contact |
 Daniel Lewisdlewis17@umd.edu 301-405-5018 |
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| Rates | UMD $81/hr No Charge $0/hr Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr |
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| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
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| SOPs | ||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
