Operational Status | ● Offline | |||||||||||||||
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Description |
![]() Several hazardous gases are plumbed into this system, including: silane, diborane, phosphine and hydrogen. Extreme care must be exercised by users. |
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Location | FabLab |
CVD Tunnel
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Manufacturer |
Atomate |
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Staff Contact |
![]() tcl@umd.edu 301-405-3642 |
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Rates | Large Commercial $220/hr Small Commercial / MTECH $158/hr External Non-profit / University $116/hr UMD $75/hr No Charge $0/hr |
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Reservations | No upcoming reservations at this time. | |||||||||||||||
Logs |
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SOPs | ||||||||||||||||
Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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Recipes |