| Operational Status | ● Online | |||||||||||||||
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| Description |
Dedicated to pre-cleaning silicon substrates prior to CVD or furnace processing.
This wet bench is not available to FabLab users - FabLab staff only please. |
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| Location | FabLab |
CVD Tunnel
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| Staff Contact |
FabLab Staff fablab@umd.edu |
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| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
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| SOPs | ||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes | Wet Etch Recipescolor_chart_for_SiO2_film_thickness.doc (86 KB)etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf (1.02 MB) seminconductor_processing_recipes.doc (37.5 KB) silicon_etching_and_cleaning.doc (176 KB) wet_etch_121500.pdf (13.43 KB) |
