March 28, 2024 UMD Home FabLab AIMLab
Critical Point Dryer Back to Equipment List
Operational Status ● Online
Description

The Supercritical Point Dryer anti-stiction release system increases both yield and uniformity of MEMS devices. Carbon dioxide is used as the transitional dry release fluid following wet etching steps. Auto-Process up to 5 - 4" wafers in less than 1 hour.

Location FabLab | ETCH Tunnel
Manufacturer
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Nov 08, 2023
3:00 pm - 4:00 pm
Mohammad Habibur Rahaman
View Reservation
Wed, Aug 09, 2023
12:30 pm - 1:30 pm
Mohammad Habibur Rahaman
View Reservation
Thu, Jul 27, 2023
11:30 am - 12:30 pm
Mohammad Habibur Rahaman
View Reservation
Wed, Jul 05, 2023
5:00 pm - 6:00 pm
Mohammad Habibur Rahaman
View Reservation
Wed, Jul 05, 2023
4:30 pm - 5:00 pm
Mohammad Habibur Rahaman
View Reservation
Records to show:
SOPs
Etch -13 Supercritical Point Dryer SOP.pdf (1.88 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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