| Operational Status | ● Online | |||||||||||||||
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| Description |
TAKEN OFFLINE. The Sopra was extensively damaged in the LAMP fire and will be replaced in the June 2012 time frame.
Sopra GES-5E spectroscopic ellipsometer, Model XYZ 8” (190-900nm) is a fully automated measurement tool which measures the optical properties of thin film semiconductor materials, specifically the complex refractive index or dielectric function. Additionally, the Sopra has mapping functionality and the incidence angle can be varied (typically, measurements are made from 60 to 85°). This tool is commonly used for analyzing film thicknesses and optical properties of single layer films, but it can also be used to measure the properties of more complex structures such as multi-layers, interface roughness or inhomogeneous layers.
The WinSE software program interfaces with the Sopra to perform the measurements. Data collected by the WinSE program can be analyzed in the Winelli II software program for determining film properties such as band gap, refractive index, extinction coefficient and thickness. A regression model characterizes a layer with either an n&k model or a dispersion model (laws including Cauchy, Sellmeier, Forouhi, and Tauc Lorentz).Models for various materials have been created, including Al compounds, Ge compounds, glasses, nitrides, oxides, oxynitrides, semiconductor III-V and II-VI materials, silicon, and silicon compounds.
The Sopra spectroscopic ellipsometer is available for use on a limited basis by NanoCenter members, where applications are relatively straightforward and usage does not overburden the instrument. Located in the clean room portion of the LAMP lab (JM Patterson 2225), it is managed by the Rubloff group, through which training and access are carried out. Usage for more complex, demanding applications (e.g., multilayers or wafer mapping) may not be supported by the group, as issues concerning modeling software and system control software can become difficult. |
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| Location | LAMP-NBSL | J.M. Patterson 2225 | |||||||||||||||
| Manufacturer |
Sopra GES5E Link |
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| Staff Contact |
Alexander Kozen ackozen@umd.edu |
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| Rates | ||||||||||||||||
| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
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| SOPs | ||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
