June 24, 2018 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA Plasma FIB/SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $137/hour; any additional hours in that same billing cycle will be billed at $110/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Rates
UMD
$45/hr
External Non-profit / University
$137/hr
Small Commercial / MTECH
$190/hr
Large Commercial
$235/hr
Reservations
Date Start End User
06/25/2018 12:00 PM 08:00 PM Wen-An Chiou
06/26/2018 12:00 PM 08:00 PM Wen-An Chiou
06/27/2018 12:00 PM 08:00 PM Wen-An Chiou
06/28/2018 12:00 PM 08:00 PM Wen-An Chiou
06/29/2018 12:00 PM 07:00 PM Wen-An Chiou
Logs
Mon, Jul 02, 2018
1:00 pm - 6:00 pm
Jake Steiner
View Reservation
TEM lamella rough etching / JCRao
Fri, Jun 29, 2018
12:00 pm - 7:00 pm
Wen-An Chiou
View Reservation
FIB Short Course
Thu, Jun 28, 2018
12:00 pm - 8:00 pm
Wen-An Chiou
View Reservation
FIB Short Course
Wed, Jun 27, 2018
12:00 pm - 8:00 pm
Wen-An Chiou
View Reservation
FIB Short Course
Tue, Jun 26, 2018
12:00 pm - 8:00 pm
Wen-An Chiou
View Reservation
FIB Short Course
Records to show:
SOPs
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2018