September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA Plasma FIB/SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $137/hour; any additional hours in that same billing cycle will be billed at $110/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Rates
UMD
$90/hr
External Non-profit / University
$137/hr
Small Commercial / MTECH
$190/hr
Large Commercial
$235/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Jul 10, 2020
10:00 am - 12:00 pm
Mustafa Buyukkaya
View Reservation
Mon, Jul 06, 2020
10:00 am - 12:00 pm
Mustafa Buyukkaya
View Reservation
Added by WAC, 07/18/20.
Wed, Jul 01, 2020
9:00 am - 4:30 pm
Jiancun Rao
View Reservation
Xe ion source and beam status check
Thu, Mar 19, 2020
11:30 am - 10:30 pm
Jiancun Rao
View Reservation

Deleted by: Jiancun Rao

Wed, Mar 11, 2020
1:00 pm - 4:30 pm
Carles Corbella
View Reservation
FIB and SEM assisted by JCrao
Records to show:
SOPs
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2020