September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA Plasma FIB/SEM

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $137/hour; any additional hours in that same billing cycle will be billed at $110/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Staff Contact Wen-AnWen-An Chiou
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Fri, Jul 10, 2020
10:00 am - 12:00 pm
Mustafa Buyukkaya
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Mon, Jul 06, 2020
10:00 am - 12:00 pm
Mustafa Buyukkaya
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Added by WAC, 07/18/20.
Wed, Jul 01, 2020
9:00 am - 4:30 pm
Jiancun Rao
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Xe ion source and beam status check
Thu, Mar 19, 2020
11:30 am - 10:30 pm
Jiancun Rao
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Deleted by: Jiancun Rao

Wed, Mar 11, 2020
1:00 pm - 4:30 pm
Carles Corbella
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FIB and SEM assisted by JCrao
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