December 1, 2021 UMD Home FabLab AIMLab
MJB-3 Mask Aligner- Left of spin station #2 Back to Equipment List
Operational Status ‚óŹ Online
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists.
Location FabLab | Teaching Lab
Manufacturer
Staff Contact FabLab Staff
fablab@umd.edu
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Nov 18, 2021
9:30 am - 10:00 am
Emma Huckestein
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Expose 3 in mask of various MW antennas onto a 3 in sapphire wafer coated in 10 nm Cr and 300 nm Au.
Wed, Nov 17, 2021
10:00 am - 10:30 am
Emma Huckestein
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Deleted by: Emma Huckestein

Aligning mask onto 3 in sapphire wafer coated with 10 nm Cr and 300 nm gold.
Tue, Nov 09, 2021
9:00 am - 11:00 am
Mark Lecates
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Thu, Nov 04, 2021
12:15 pm - 12:45 pm
Marco Casareto
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Wed, Nov 03, 2021
9:00 am - 12:00 pm
Mark Lecates
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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