December 1, 2021 UMD Home FabLab AIMLab
AJA ATC Orion 8 Sputtering system Back to Equipment List
Operational Status ‚óŹ Online
Description Targets 1-Au, 2-V2O5, 3-W, 4-Li2O, 5-Cu, 6-Si, 7-Al, 8-Li3PO4 Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $75/hr for UMCP NanoCenter members, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) Precious metals surcharge(10/11): Au & Pd: $82 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
12/03/2021 12:00 PM 09:00 AM Jonathan Hummel
Logs
Fri, Dec 03, 2021
12:00 pm - 9:00 am
Jonathan Hummel
View Reservation
Tue, Nov 30, 2021
10:30 am - 11:00 am
Haotian Wang
View Reservation
Deposit 200nm W for following poly-Si growth. (Used for SSB for platform project)
Tue, Nov 23, 2021
12:00 pm - 9:00 am
Jonathan Hummel
View Reservation
Wed, Nov 17, 2021
10:00 am - 10:00 am
Haotian Wang
View Reservation
Continuation of reservation #sc1618effa413ca3, incurs reduced rate
Mon, Nov 15, 2021
2:00 pm - 2:00 pm
Haotian Wang
View Reservation
For LiPON(200nm) and LVO(600nm) sputtering. The cell will be used for in-situ XRD experiment.
Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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