August 19, 2022 UMD Home FabLab AIMLab
AJA ATC Orion 8 Sputtering system Back to Equipment List
Operational Status ‚óŹ Online
Description Targets 1-NbN, 2-Ti, 3-V2O5, 4-Li2O, 5-Cu, 6-Si, 7-Li3PO4, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $75/hr for UMCP NanoCenter members, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) Precious metals surcharge(10/11): Au & Pd: $82 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
08/19/2022 10:00 AM 07:00 PM Victoria Castagna Ferrari
Logs
Fri, Aug 19, 2022
10:00 am - 7:00 pm
Victoria Castagna Ferrari
View Reservation
V2O5-Li2O-LiPON
Thu, Aug 18, 2022
1:00 pm - 2:00 pm
Haotian Wang
View Reservation
Si
Wed, Aug 17, 2022
2:30 pm - 3:00 pm
Haotian Wang
View Reservation
W
Tue, Aug 16, 2022
4:30 pm - 7:30 pm
Victoria Castagna Ferrari
View Reservation
LVO
Mon, Aug 15, 2022
3:00 pm - 4:00 pm
Nam Kim
View Reservation

Deleted by: Jonathan Hummel

485 cyc TiN
Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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