April 3, 2020 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC Orion 8 Sputtering system
Description Targets 1-LPO, 2-V2O5, 3-W, 4-Li2O, 5-Au, 6-Cu, 7-Ti, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) Precious metals surcharge(10/11): Au & Pd: $82 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Mar 19, 2020
12:30 pm - 2:00 pm
Nam Kim
View Reservation
Wed, Mar 18, 2020
11:00 am - 7:30 pm
Nam Kim
View Reservation
Tue, Mar 17, 2020
11:00 am - 12:30 pm
Kevin Palm
View Reservation
Mg +Al + 50 nm Pd = $41
Mon, Mar 16, 2020
12:00 pm - 4:00 pm
Kevin Palm
View Reservation
Mg, Ti, 30 nm Pd = $16
Fri, Mar 13, 2020
12:00 pm - 8:30 pm
Nam Kim
View Reservation
Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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