|Operational Status||● Online|
|Description||Targets 1-Au, 2-V2O5, 3-W, 4-Li2O, 5-Cu, 6-Si, 7-Al, 8-Li3PO4 Please email Jon Hummel at email@example.com if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $75/hr for UMCP NanoCenter members, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) Precious metals surcharge(10/11): Au & Pd: $82 per 1000A Pt: $70 per 1000A|
|Location||FabLab | FabLab Dep tunnel|
AJA International ATC Orion 8
External Non-profit / University
Small Commercial / MTECH
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