March 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC Orion 8 Sputtering system
Description Targets 1-LiMn2O4, 2-Cr, 3-LiPO4, 4-Al, 5-Au See notes below. Please email Jon Hummel at if the targets(s) you need are not in the tool the day before you need them. This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
301 405-5017
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Thu, Mar 15, 2018
1:00 pm - 10:00 am
Jonathan Larson
View Reservation
Cr, Au, LiPON
Thu, Mar 15, 2018
11:00 am - 11:30 am
Angelique Jarry
View Reservation
Au: 1600A : $100
Tue, Mar 13, 2018
1:00 pm - 3:00 pm
Nam Kim
View Reservation
Mon, Mar 12, 2018
5:00 pm - 2:00 am
Angelique Jarry
View Reservation
Fri, Mar 09, 2018
5:00 pm - 9:00 am
Angelique Jarry
View Reservation
Records to show:
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland