June 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC Orion 8 Sputtering system
Description Targets 1-Si N type P doped, 2-Cr, 3-Cu, 4-Au, 5-W, 6-LiCoO2 Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
06/22/2018 10:00 AM 12:00 AM John Hayden
Logs
Fri, Jun 22, 2018
10:00 am -
John Hayden
View Reservation
Ti/Cu/Ti/W/Al
Thu, Jun 21, 2018
10:15 am - 4:15 pm
Blake Nuwayhid
View Reservation
1180A Au $74, Li3PO4
Wed, Jun 20, 2018
10:15 am - 8:00 pm
Blake Nuwayhid
View Reservation
60A Au $37. Li3PO4
Tue, Jun 19, 2018
3:30 pm - 8:30 pm
Blake Nuwayhid
View Reservation
Cr, 60A Au $37. Li3PO4
Tue, Jun 19, 2018
1:00 pm - 3:00 pm
Jake Ballard
View Reservation

Deleted by: Jonathan Hummel

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SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
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Recipes

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