| Operational Status | ● Online | |||||||||||||||
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| Description |
Targets 1-V2O5, 2-FeF3, 3-Cr, 4-LiO2, 5-Al, 6-ZnO 7-Li3PO4, 8-Au Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them.
First 2 hours of the run: $81/hr for UMCP NanoCenter members, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.
For runs over 2 hours: $11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)
This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au).
Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges)
Precious metals surcharge(7/18):
Au & Pd: $110 per 1000A
Pt: $100 per 1000A |
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| Location | FabLab |
Dep tunnel
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| Manufacturer |
AJA International ATC Orion 8 |
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| Staff Contact |
 Jonathan Hummeljhummel1@umd.edu 301 405-5017 |
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| Rates | No Charge $0/hr Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr |
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| Logs |
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| SOPs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
