June 30, 2025 UMD Home FabLab AIM Lab
AJA ATC Orion 8 Sputtering system Back to Equipment List
Operational Status ● Online
Description Targets 1-V2O5, 2-Au, 3-Ti, 4-LiO2, 5-Cr, 6-W 7-Li3PO4, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $81/hr for UMCP NanoCenter members, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial. For runs over 2 hours: $11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) Precious metals surcharge(7/18): Au & Pd: $110 per 1000A Pt: $100 per 1000A
Location FabLab | Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
07/01/2025 09:15 AM 01:30 PM Leopoldo Tapia-Aracayo
07/03/2025 07:00 AM 07:30 AM Stefan Theodoru
Logs
Thu, Jul 03, 2025
7:00 am - 7:30 am
Stefan Theodoru
View Reservation
100nm Au ($110+$40.5 tool time)
Tue, Jul 01, 2025
9:15 am - 1:30 pm
Leopoldo Tapia-Aracayo
View Reservation
LiPON Process Development
Mon, Jun 30, 2025
4:45 pm - 9:00 pm
Leopoldo Tapia-Aracayo
View Reservation
V2O5 200nm
Mon, Jun 30, 2025
9:15 am - 2:30 pm
Leopoldo Tapia-Aracayo
View Reservation
LiPON Process Development (100nm total)
Fri, Jun 27, 2025
4:00 pm - 10:00 pm
Leopoldo Tapia-Aracayo
View Reservation
200nm V2O5 Annealed During Dep
Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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