January 16, 2018 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC Orion 8 Sputtering system
Description Targets 1-LiMn2O4, 2-Cr, 3-LiPO4, 4-LiCoO2, 5-Au Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$236.25/hr
Large Commercial
$300/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Thu, Dec 14, 2017
12:00 pm - 10:00 pm
Keith Gregorczyk
View Reservation
LCO Development
Wed, Dec 13, 2017
10:15 am - 8:00 pm
Keith Gregorczyk
View Reservation

Deleted by: Keith Gregorczyk

LCO Development
Tue, Dec 12, 2017
4:00 pm - 8:00 am
Keith Gregorczyk
View Reservation
LCO Development
Mon, Dec 11, 2017
10:00 am - 10:00 pm
Keith Gregorczyk
View Reservation
LCO Process Development
Fri, Dec 08, 2017
11:15 am - 8:00 pm
Keith Gregorczyk
View Reservation
LCO Development
Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2018