The Kratos AXIS UltraDLD system is a UHV surface analysis system including a
variety of photon, electron, and ion sources and detectors. Possible modes of operation are:
o XPS spectroscopy and imaging, using either monochromatic Al/Ag or non-monochromatic Al/Mg sources, with few 10's micron spatial resolution
o UPS spectroscopy using He discharge lamp (He I 21.2eV, He II 40.8 eV)
o Scanning Auger electron microscopy (SAM) for spectroscopy and imaging with ~200nm lateral resolution; also secondary electron microscopy (SEM)
o Ar/coronene ion gun for sputter depth profiling
o Ion scattering spectroscopy (ISS)
This system is connected by UHV sample/wafer transfer to the integrated system in ANSLab, accommodating multistep experiments as well as straightforward small samples for standard surface analysis.
NOTE: Access to ANSLab is typically limited to the Rubloff group and selected close collaborators outside the group. However, on occasion the Rubloff group develops a collaboration or assists with a service for other outside users. If interested, send an email to email@example.com with a brief description of what you are seeking. Minimum charge is for 4 hours, which include sample introduction, alignment, and removal.
|Location||ANSLab | 0202 IREAP|
External Non-profit / University
Small Commercial / MTECH
|Reservations||No upcoming reservations at this time.
Please login to make a reservation.
You must have lab permissions to view the manuals.
Please login to view manuals or contact the lab staff to obtain permissions.