September 23, 2018 UMD Home FabLab AIMLab
Back to Equipment List Kratos UHV surface analysis system
Description The Kratos AXIS UltraDLD system is a UHV surface analysis system including a variety of photon, electron, and ion sources and detectors. Possible modes of operation are:

o XPS spectroscopy and imaging, using either monochromatic Al/Ag or non-monochromatic Al/Mg sources, with few 10's micron spatial resolution

o UPS spectroscopy using He discharge lamp (He I 21.2eV, He II 40.8 eV)

o Scanning Auger electron microscopy (SAM) for spectroscopy and imaging with ~200nm lateral resolution; also secondary electron microscopy (SEM)

o Ar/coronene ion gun for sputter depth profiling

o Ion scattering spectroscopy (ISS)

This system is connected by UHV sample/wafer transfer to the integrated system in ANSLab, accommodating multistep experiments as well as straightforward small samples for standard surface analysis.

NOTE: Access to ANSLab is typically limited to the Rubloff group and selected close collaborators outside the group. However, on occasion the Rubloff group develops a collaboration or assists with a service for other outside users. If interested, send an email to rubloff@umd.edu with a brief description of what you are seeking. Minimum charge is for 4 hours, which include sample introduction, alignment, and removal.
Location ANSLab | 0202 IREAP
Manufacturer
Rates
UMD
$45/hr
External Non-profit / University
$68/hr
Small Commercial / MTECH
$120/hr
Large Commercial
$155/hr
Reservations No upcoming reservations at this time.
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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