September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List In-situ sensing in Fiji ALD systems (Mario, Luigi)
Description Both Fiji ALD systems (Mario and Luigi) in the ALD Nanostructures Lab can be operated using real-time, in-situ sensing to monitor, analyze and control the process. The sensing techniques are:

Woollam M2000 spectroscopic ellipsometry - monitors optical properties of surface during ALD deposition, typically providing monolayer-level sensitivity for thickness measure and insight into ALD process chemistry.

MKS downstream mass spectrometry - monitors ALD reactant and product species, indicating chemical reaction pathways and providing guidance for optimizing process recipes

Either or both techniques can be employed in ALD processes. Fees shown are for each technique.
Location ANSLab | 0202 IREAP
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Tue, Jun 11, 2019
8:00 am - 6:00 pm
Chuan-Fu Lin
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Mon, Jun 10, 2019
8:00 am - 6:00 pm
Chuan-Fu Lin
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