Both Fiji ALD systems (Mario and Luigi) in the ALD Nanostructures Lab can be operated using real-time, in-situ sensing to monitor, analyze and control the process. The sensing techniques are:
Woollam M2000 spectroscopic ellipsometry - monitors optical properties of surface during ALD deposition, typically providing monolayer-level sensitivity for thickness measure and insight into ALD process chemistry.
MKS downstream mass spectrometry - monitors ALD reactant and product species, indicating chemical reaction pathways and providing guidance for optimizing process recipes
Either or both techniques can be employed in ALD processes. Fees shown are for each technique.
|Location||ANSLab | 0202 IREAP|
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