May 1, 2025 UMD Home FabLab AIMLab
Heidelberg MLA150 Maskless Aligner Back to Equipment List
Operational Status ● Online
Description The Maskless Aligner MLA 150 is a state-of-the-art maskless lithography tool. Areas of application include nanofabrication of quantum devices (2D materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple grayscale structures. It is available with 375nm and 405nm lasers, have pneumatic autofocus, and is able to pattern from 12mm to 6in wafer. Check with resist manufacturer to find the starting dosage. New resists will require optimization. NOTE: 1) Users are limited to 3 hours max during normal hours (7 AM to 5 PM). Either 1 long reservation, or several smaller ones totaling 3 hours 2) If longer runs or additional times are needed, reservations must be made during after-hours (after 5 PM) 3) Do not use the tool without reserving it 4) Do not make any reservations further than a week in advance 5) Do not make reservations for more than 2 days at a time 6) Be ready to use the tool during the time(s) you have it reserved. Arrive early to clean your sample, spin & bake resist, etc. so that you can begin your write when your reservation starts 7) Failure to follow these guidelines will result in loss of tool access
Location FabLab | Photolithography Tunnel
Manufacturer Heidelberg MLA 150
Staff Contact NamNam Kim
nsk0248@umd.edu
301-405-6664
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
05/02/2025 09:00 AM 11:00 AM Mitchell Gross
05/02/2025 11:00 AM 12:00 PM Dev Udawattage
05/02/2025 12:15 PM 12:30 PM Nishchal Tripathi
05/02/2025 02:00 PM 04:00 PM Yi-Siou Huang
05/06/2025 02:00 PM 03:00 PM Mateo Lim
Logs
Tue, May 06, 2025
2:00 pm - 3:00 pm
Mateo Lim
View Reservation
Fri, May 02, 2025
5:00 pm - 8:00 pm
Tahir Mahmud
View Reservation

Deleted by: Tahir Mahmud

Fri, May 02, 2025
3:00 pm - 5:30 pm
Tahir Mahmud
View Reservation

Deleted by: Tahir Mahmud

Fri, May 02, 2025
2:00 pm - 4:00 pm
Yi-Siou Huang
View Reservation
Fri, May 02, 2025
12:15 pm - 12:30 pm
Nishchal Tripathi
View Reservation
Records to show:
SOPs
SOP for MLA150 V2.docx (10.51 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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