December 1, 2021 UMD Home FabLab AIMLab
Oxford ICP Etcher(Chlorine) Back to Equipment List
Operational Status ‚óŹ Online
Description This Oxford Plasmalab System 100 is an Inductively Coupled Plasma (ICP) reactive ion etcher. Gases plumbed to the system include:
  • Cl2, O2
  • SiCl4, SF6
  • CH4, Ar
  • H2, N2
This etcher is used primarily for etching III-V materials and aluminum.

The standard operating procedure for this tool is loaded into the PC that supports the ICP etcher.
Location FabLab | ETCH Tunnel
Manufacturer Oxford Instruments
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
12/02/2021 09:00 AM 12:00 PM Thomas Loughran
Logs
Thu, Dec 02, 2021
9:00 am - 12:00 pm
Thomas Loughran
View Reservation
Wed, Dec 01, 2021
9:00 am - 11:00 am
Thomas Loughran
View Reservation

Deleted by: Thomas Loughran

Tue, Nov 30, 2021
10:30 am - 12:00 pm
Mark Lecates
View Reservation
LPS
Mon, Nov 29, 2021
1:00 pm - 1:15 pm
Deric Session
View Reservation
Mon, Nov 29, 2021
11:15 am - 11:45 am
Mitchell Gross
View Reservation
Records to show:
SOPs
Oxford Chlorine Etcher SOP.pdf (384 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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