May 1, 2025 UMD Home FabLab AIMLab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Apr 30, 2025
4:00 pm - 5:00 pm
Tahir Mahmud
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Wed, Apr 30, 2025
3:00 pm - 4:00 pm
Tahir Mahmud
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Tue, Apr 29, 2025
6:45 pm - 7:15 pm
Kyle Martin
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Tue, Apr 29, 2025
2:00 pm - 3:00 pm
Tahir Mahmud
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Tue, Apr 29, 2025
8:45 am - 9:00 am
Utku Noyan
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Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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