April 30, 2026 UMD Home FabLab AIM Lab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
05/01/2026 11:30 AM 11:45 AM Henry Gagliardi
Logs
Fri, May 01, 2026
11:30 am - 11:45 am
Henry Gagliardi
View Reservation
Thu, Apr 30, 2026
11:00 am - 11:15 am
Tahir Mahmud
View Reservation
Wed, Apr 29, 2026
5:30 pm - 5:45 pm
Tahir Mahmud
View Reservation
Tue, Apr 28, 2026
10:30 am - 12:00 pm
Julia Ju
View Reservation
Kyle
Mon, Apr 27, 2026
6:00 pm - 6:15 pm
Tahir Mahmud
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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