November 5, 2025 UMD Home FabLab AIM Lab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Nov 04, 2025
4:15 pm - 4:30 pm
Thomas Wong
View Reservation
Mon, Nov 03, 2025
12:45 pm - 1:00 pm
Yi-Siou Huang
View Reservation
Sat, Nov 01, 2025
4:00 pm - 4:15 pm
Linfeng Ai
View Reservation
Fri, Oct 31, 2025
12:15 pm - 12:30 pm
Yi-Siou Huang
View Reservation
Fri, Oct 31, 2025
11:00 am - 11:30 am
Thomas Wong
View Reservation
Training with Daniel Lewis
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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