February 13, 2026 UMD Home FabLab AIM Lab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
02/13/2026 10:00 AM 10:15 AM Henry Gagliardi
Logs
Fri, Feb 13, 2026
10:00 am - 10:15 am
Henry Gagliardi
View Reservation
Thu, Feb 12, 2026
2:15 pm - 2:30 pm
Henry Gagliardi
View Reservation

Deleted by: Henry Gagliardi

Wed, Feb 11, 2026
5:15 pm - 5:30 pm
Tahir Mahmud
View Reservation
Tue, Feb 10, 2026
6:00 pm - 6:30 pm
Tahir Mahmud
View Reservation
Fri, Feb 06, 2026
4:30 pm - 5:30 pm
Tahir Mahmud
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2026