| Operational Status | ● Online | |||||||||||||||
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| Description |
The Parylene Deposition System Model 2010 is a vacuum system used for the
sublimation and subsequent deposition of Parylene onto a silicon wafer (or
other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch
wafer can be processed at one time. Only trained and approved users may use this machine. |
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| Location | FabLab |
Exploratory Lab
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| Manufacturer |
SCS Equipment PDS 2010 Labcoter 2 Link |
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| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
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| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
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| Reservations |
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| Logs |
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| SOPs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
