December 1, 2021 UMD Home FabLab AIMLab
Parylene Coater Back to Equipment List
Operational Status ‚óŹ Online
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Wed, Jan 22, 2020
9:00 am - 12:00 pm
Ryan Huiszoon
View Reservation
2 micron Parylene C device coating
Mon, Oct 07, 2019
7:00 am - 12:00 pm
John Abrahams
View Reservation
1.5 grams
Fri, Oct 04, 2019
12:00 pm - 4:00 pm
John Abrahams
View Reservation
1.5 um deposition on ALD coated samples
Tue, Aug 20, 2019
11:00 am - 2:00 pm
Sanwei Liu
View Reservation
Thu, Aug 15, 2019
10:00 am - 1:00 pm
Ryan Huiszoon
View Reservation
2.5um parylene device coating.
Records to show:
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland