July 9, 2020 UMD Home FabLab AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Link
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Jan 22, 2020
9:00 am - 12:00 pm
Ryan Huiszoon
View Reservation
2 micron Parylene C device coating
Mon, Oct 07, 2019
7:00 am - 12:00 pm
John Abrahams
View Reservation
1.5 grams
Fri, Oct 04, 2019
12:00 pm - 4:00 pm
John Abrahams
View Reservation
1.5 um deposition on ALD coated samples
Tue, Aug 20, 2019
11:00 am - 2:00 pm
Sanwei Liu
View Reservation
Thu, Aug 15, 2019
10:00 am - 1:00 pm
Ryan Huiszoon
View Reservation
2.5um parylene device coating.
Records to show:
SOPs
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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