June 24, 2018 UMD Home FabLab AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Link
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Jun 20, 2018
10:00 am - 11:30 am
Abraham Chen
View Reservation
Wed, May 23, 2018
10:45 am - 12:15 pm
Abraham Chen
View Reservation
Mon, May 14, 2018
3:30 pm - 5:00 pm
Abraham Chen
View Reservation
Wed, May 09, 2018
3:00 pm - 5:30 pm
Abraham Chen
View Reservation
Wed, May 09, 2018
10:30 am - 12:30 pm
Abraham Chen
View Reservation

Deleted by: Abraham Chen

Records to show:
SOPs
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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