August 19, 2022 UMD Home FabLab AIMLab
Angstrom NexDep Ebeam evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.

This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Tue, Aug 16, 2022
9:30 am - 12:30 pm
Cory Bomberger
View Reservation
Mon, Aug 15, 2022
10:00 am - 12:00 pm
Hongyi Sun
View Reservation

Deleted by: Hongyi Sun

Wed, Aug 10, 2022
7:30 am - 8:30 am
Mitchell Gross
View Reservation
Overnight pumpdown - Ni
Tue, Aug 09, 2022
6:00 pm - 8:00 pm
Mitchell Gross
View Reservation
Overnight pumpdown- Ni
Mon, Aug 08, 2022
10:45 am - 12:45 pm
Hongyi Sun
View Reservation
Records to show:
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)

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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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