December 1, 2021 UMD Home FabLab AIMLab
Angstrom NexDep Ebeam evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.


This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
12/03/2021 08:00 AM 10:30 AM Hyeok Yoon
Logs
Fri, Dec 03, 2021
8:00 am - 10:30 am
Hyeok Yoon
View Reservation
Ti (3 nm)/Au(200 nm), I will put the sample in the evening the day before the deposition.
Wed, Dec 01, 2021
8:00 am - 11:00 am
Sean O'Leary
View Reservation
Tue, Nov 23, 2021
1:00 pm - 9:00 pm
Mark Lecates
View Reservation

Deleted by: Mark Lecates

Tue, Nov 23, 2021
12:30 pm - 8:30 pm
Mark Lecates
View Reservation
Tue, Nov 23, 2021
11:30 am - 1:00 pm
Joseph Brock
View Reservation

Deleted by: Joseph Brock

Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2021