| Operational Status | ● Online | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description |
The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / PtHandles up to five 4" diameter substrates |
|||||||||||||||
| Location | FabLab |
Dep Tunnel
|
|||||||||||||||
| Manufacturer |
Angstrom |
|||||||||||||||
| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
|||||||||||||||
| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
|||||||||||||||
| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs |
|
|||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
| Recipes |
