March 23, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Date Start End User
03/23/2018 01:00 PM 04:30 PM Christie Trimble

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Fri, Mar 23, 2018
1:00 pm - 4:30 pm
Christie Trimble
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Ti + 100nm Au
Fri, Mar 23, 2018
10:30 am - 1:00 pm
Yiwen Hu
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Thu, Mar 22, 2018
5:30 pm - 7:00 pm
Yonggang Yao
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Au 100 nm
Thu, Mar 22, 2018
1:00 pm - 5:00 pm
Shahriar Aghaeimeibodi
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50 nm gold
Thu, Mar 22, 2018
11:30 am - 1:00 pm
Shengjie Xie
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Records to show:
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)

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