January 16, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$30/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Thu, Jan 11, 2018
1:30 pm - 5:00 pm
Rodney Snyder
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Deleted by: Rodney Snyder

100nm Au
Thu, Jan 11, 2018
1:30 pm - 4:30 pm
Rodney Snyder
View Reservation
3nm Ti/100nm Au Gold charge=$63
Thu, Jan 11, 2018
11:45 am - 12:45 pm
Lara Skibbie
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Wed, Jan 10, 2018
2:30 pm - 4:30 pm
Wei-Lun Hsu
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Wed, Jan 10, 2018
3:00 am - 6:30 am
Christie Trimble
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4 nm Ti 100 nm Au Gold charge=$63
Records to show:
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)

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