July 9, 2020 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.


This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Jul 09, 2020
12:00 pm - 5:00 pm
Mark Lecates
View Reservation
Mon, Jun 29, 2020
10:00 am - 12:00 pm
Mitchell Gross
View Reservation

Deleted by: Mark Lecates

Thu, Jun 25, 2020
10:00 am - 12:00 pm
Aysanew Abate
View Reservation

Deleted by: Jonathan Hummel

Ni
Thu, Jun 18, 2020
4:00 pm - 6:00 pm
Mitchell Gross
View Reservation
Abrahams- Overnight pump and morning run
Tue, Jun 16, 2020
11:00 am - 3:00 pm
Jacqueline Hines
View Reservation
Abrahams- Jackie Metal deposition
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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