September 20, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Date Start End User
09/20/2018 03:00 PM 05:00 PM Wei-Lun Hsu
Thu, Sep 20, 2018
3:00 pm - 5:00 pm
Wei-Lun Hsu
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Wed, Sep 19, 2018
3:30 pm - 5:30 pm
Wei-Lun Hsu
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Wed, Sep 19, 2018
12:45 pm - 1:45 pm
Aysanew Abate
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Wed, Sep 19, 2018
9:30 am - 11:30 am
Yang Zhang
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Wed, Sep 19, 2018
8:00 am - 9:00 am
Aysanew Abate
View Reservation

Deleted by: Aysanew Abate

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Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)

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