December 13, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
12/13/2018 01:00 PM 03:00 PM Julia Sell
Logs
Thu, Dec 13, 2018
1:00 pm - 3:00 pm
Julia Sell
View Reservation
70nm Au - $44.10
Wed, Dec 12, 2018
4:00 pm - 6:00 pm
YANGYI YAO
View Reservation
Fri, Dec 07, 2018
2:15 pm - 4:15 pm
Evan Yamaguchi
View Reservation
70nm Au; gold charge $44
Fri, Dec 07, 2018
11:00 am - 1:00 pm
Heshan Yu
View Reservation
Gold deposition 50nm Gold charge=$31.50
Thu, Dec 06, 2018
7:30 pm - 9:30 pm
Yang Zhang
View Reservation
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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