January 16, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$30/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Thu, Jan 11, 2018
1:30 pm - 5:00 pm
Rodney Snyder
View Reservation

Deleted by: Rodney Snyder

100nm Au
Thu, Jan 11, 2018
1:30 pm - 4:30 pm
Rodney Snyder
View Reservation
3nm Ti/100nm Au Gold charge=$63
Thu, Jan 11, 2018
11:45 am - 12:45 pm
Lara Skibbie
View Reservation
Wed, Jan 10, 2018
2:30 pm - 4:30 pm
Wei-Lun Hsu
View Reservation
Ag
Wed, Jan 10, 2018
3:00 am - 6:30 am
Christie Trimble
View Reservation
4 nm Ti 100 nm Au Gold charge=$63
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2018