November 12, 2024 UMD Home FabLab AIMLab
MA-4 Suss Mask Aligner Back to Equipment List
Operational Status ● Online
Description The Karl Suss MA-4 Mask Aligner is used with substrates up to 4" (100mm) in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below. This system also offers real-time infrared through-wafer backside alignment.
Location FabLab | Photo Tunnel
Manufacturer Karl Suss MA-4
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Oct 16, 2024
12:00 pm - 12:30 pm
Steven Hong
View Reservation
steven
Mon, Oct 14, 2024
9:00 am - 11:00 am
Mark Lecates
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Fri, Oct 11, 2024
10:45 am - 11:30 am
Ian Smith
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Thu, Oct 10, 2024
10:15 am - 10:45 am
Ian Smith
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Tue, Oct 08, 2024
11:30 am - 12:30 pm
Ian Smith
View Reservation
Records to show:
SOPs
MA- 4 Operating Instructions.pdf (21.04 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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