December 1, 2021 UMD Home FabLab AIMLab
MA-4 Suss Mask Aligner Back to Equipment List
Operational Status ‚óŹ Online
Description The Karl Suss MA-4 Mask Aligner is used with substrates up to 4" (100mm) in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below. This system also offers real-time infrared through-wafer backside alignment.
Location FabLab | Photo Tunnel
Manufacturer Karl Suss MA-4
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Dec 01, 2021
12:00 pm - 12:30 pm
Mitchell Gross
View Reservation
Wed, Dec 01, 2021
11:00 am - 11:30 am
Sean O'Leary
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Tue, Nov 30, 2021
12:45 pm - 1:15 pm
Ian Smith
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Mon, Nov 29, 2021
10:30 am - 11:00 am
Mitchell Gross
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Fri, Nov 19, 2021
11:00 am - 11:45 am
Harsimranjit Singh
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Records to show:
SOPs
MA- 4 Operating Instructions.pdf (21.04 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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