April 22, 2025 UMD Home FabLab AIMLab
Operational Status ● Online
Description The Trion RIE is used to remove photoresist residue. Plumbed with O2,CF4,CHF3 and Sf6 the Etcher is an aggressive etcher for any organic material. Can be used to etch thin layers of SiO2 ,SiN and Si
Location FabLab | ETCH Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Apr 22, 2025
2:45 pm - 3:00 pm
Tahir Mahmud
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Deleted by: Tahir Mahmud

Tue, Apr 22, 2025
2:30 pm - 2:45 pm
Niloy Acharjee
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Tue, Apr 22, 2025
2:00 pm - 2:15 pm
Tahir Mahmud
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Mon, Apr 21, 2025
3:30 pm - 4:00 pm
Tahir Mahmud
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Fri, Apr 18, 2025
12:00 pm - 5:00 pm
Mark Lecates
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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