December 1, 2021 UMD Home FabLab AIMLab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ‚óŹ Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Dec 01, 2021
12:30 pm - 2:30 pm
Mitchell Gross
View Reservation
Wed, Dec 01, 2021
8:00 am - 11:15 am
Sean O'Leary
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Deleted by: Sean O'Leary

SiO2
Tue, Nov 23, 2021
12:30 pm - 8:30 pm
Mark Lecates
View Reservation
Tue, Nov 23, 2021
8:00 am - 11:00 am
Stefan Theodoru
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Platnium-100nm Platinum - charge=$70
Sun, Nov 21, 2021
10:00 am - 11:00 am
Jiahao Zhan
View Reservation
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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