August 19, 2022 UMD Home FabLab AIMLab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per 1000Å
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
08/22/2022 09:30 AM 11:30 AM Mitchell Gross
Logs
Mon, Aug 22, 2022
9:30 am - 11:30 am
Mitchell Gross
View Reservation
Thu, Aug 18, 2022
3:15 pm - 5:15 pm
Daniel Lewis
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Thu, Aug 18, 2022
11:30 am - 1:30 pm
Ryan Purcell
View Reservation
Ni
Thu, Aug 18, 2022
7:00 am - 8:30 am
Mark Lecates
View Reservation
Ni
Wed, Aug 17, 2022
12:00 pm - 2:00 pm
Mitchell Gross
View Reservation
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SOPs
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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