July 9, 2020 UMD Home FabLab AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Jul 09, 2020
12:30 pm - 5:00 pm
Mark Lecates
View Reservation
Thu, Jul 09, 2020
10:30 am - 12:30 pm
Shengjie Xie
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Thu, Jul 09, 2020
8:30 am - 10:30 am
Carl Brando
View Reservation
mark Au-30nm Gold charge=$24.60
Wed, Jul 08, 2020
1:00 pm - 3:30 pm
Yiwen Hu
View Reservation
Wed, Jul 01, 2020
12:45 pm - 2:15 pm
Soaram Kim
View Reservation
old-120nm mark Gold charge=$98.40
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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