January 16, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$30/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
01/17/2018 08:00 AM 11:00 AM David Shahin
01/17/2018 01:00 PM 02:45 PM Kevin Palm
01/18/2018 08:15 AM 10:30 AM Mark Lecates

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Logs
Thu, Jan 18, 2018
8:15 am - 10:30 am
Mark Lecates
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Wed, Jan 17, 2018
1:00 pm - 2:45 pm
Kevin Palm
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Wed, Jan 17, 2018
8:00 am - 11:00 am
David Shahin
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Ni/Au 200A/1000A (Au charge $63)
Tue, Jan 16, 2018
5:30 pm - 7:30 pm
Gang Li
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Deleted by: Gang Li

Tue, Jan 16, 2018
5:30 pm - 7:30 pm
Shahriar Aghaeimeibodi
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Deleted by: Shahriar Aghaeimeibodi

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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