November 7, 2024 UMD Home FabLab AIMLab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(7/18): Au: $110 per 1000Å Pt: $100 per 1000Å Pd-$110 per 1000Å
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
11/07/2024 02:30 PM 05:30 PM Bibek Ramdam
11/07/2024 07:30 PM 09:30 PM Maxwell Xuan
11/08/2024 12:00 AM 06:00 AM Mark Lecates
11/08/2024 06:00 AM 01:00 PM Mark Lecates
11/08/2024 01:00 PM 04:00 PM Mark Lecates
Logs
Fri, Nov 08, 2024
1:00 pm - 4:00 pm
Mark Lecates
View Reservation
Fri, Nov 08, 2024
6:00 am - 1:00 pm
Mark Lecates
View Reservation
Fri, Nov 08, 2024
- 6:00 am
Mark Lecates
View Reservation
Thu, Nov 07, 2024
7:30 pm - 9:30 pm
Maxwell Xuan
View Reservation
Thu, Nov 07, 2024
2:30 pm - 5:30 pm
Bibek Ramdam
View Reservation
10 nm Cr + 15 nm Ni
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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