July 13, 2025 UMD Home FabLab AIM Lab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(7/18): Au: $110 per 1000Å Pt: $100 per 1000Å Pd-$110 per 1000Å
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations
Date Start End User
07/14/2025 09:00 AM 12:00 PM Florence Lucey
Logs
Mon, Jul 14, 2025
12:00 pm - 2:30 pm
Jay Easter
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Deleted by: Jay Easter

Mon, Jul 14, 2025
9:00 am - 12:00 pm
Florence Lucey
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Ti Au dep
Fri, Jul 11, 2025
6:30 pm - 8:00 pm
Yang Zhang
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Thu, Jul 10, 2025
12:30 pm - 5:00 pm
Florence Lucey
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15nm Ti 2500A Au Gold charge=$350
Thu, Jul 10, 2025
10:00 am - 11:45 am
Maxwell Xuan
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SOPs
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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