September 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
09/24/2018 10:30 AM 02:30 PM Lisa Krayer
09/25/2018 07:30 AM 09:30 AM Mark Lecates
Logs
Tue, Sep 25, 2018
7:30 am - 9:30 am
Mark Lecates
View Reservation
Inconel
Mon, Sep 24, 2018
10:30 am - 2:30 pm
Lisa Krayer
View Reservation
Ag, Au, Pd
Fri, Sep 21, 2018
3:00 pm - 5:00 pm
Wei-Lun Hsu
View Reservation
Ag
Fri, Sep 21, 2018
10:00 am - 12:30 pm
Lisa Krayer
View Reservation

Deleted by: Lisa Krayer

Ag and Pt
Fri, Sep 21, 2018
10:00 am - 1:00 pm
Sarvenaz Memarzadeh
View Reservation
50 nm Au($31.5)
Records to show:
SOPs
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2018