| Operational Status | ● Online | |||||||||||||||
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| Description |
The PlasmaPro 100 PECVD -is a Plasma Enhanced Chemical Vapor Deposition (PECVD) system used for deposition of SiO2 and SiNx. |
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| Location | FabLab |
CVD Tunnel
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| Manufacturer |
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| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
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| Rates | No Charge $0/hr Large Commercial $266/hr Small Commercial / MTECH $183/hr External Non-profit / University $139/hr UMD $89/hr |
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| Reservations |
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| Logs |
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| SOPs | ||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
